书目

硅表面及界面的形成(英文版)

内容简介

Siliconisthematerialofchoiceofthemultibillionsemiconductorindustry.Ongoingminiaturizationofmicroelectronicdevicesdrivescriticalregionsofintegratedcircuitseverclosertotheplacewherethesiliconendsandanothermaterialbegins,totheinterracialregion.Performanceandreliabilityofelectronicmicroelementsdependmoreandmoreonthemicroscopicqualityoftheinterfacesandonthemicroscopic-scalequalityoftheoriginalSisurfaces.Sufficetosaythatassoonasinthefirstdecadeofthecomingmilleniumthecustomerswillbeofferedmicroelectronicchipswithminimumfeaturesabouthundredatomslongandacoupleofatomsthick!Smallwonderthatatomic-scaleknowledgeisgainingacommercialvalue.

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