内容简介
Coveringtechnologicalaspectsaswellasthesuitabilityandapplicabilityofvariouskindsofuses,thishandbookshowsoptimizationstrategies,techniquesandassemblypathwaystoachievethecombinationofcomplex,eventhree-dimensionalstructureswithsimplemanufacturingsteps.Theauthorsprovideinformationonmarkets,commercializationopportunitiesandaspectsofmassorlarge-scaleproductionaswellasdesigntools,experimentaltechniques,novelmaterials,andideasforfutureimprovements.Notonlydotheyweighupcostversusquantity,theyalsoconsiderCMOSandLIGAstrategies.Ofinteresttophysicists,electronicsengineers,materialsscientists,institutionalandindustriallibrariesaswellasgraduatestudentsoftherelevantdisciplines.
作者简介
VolkerSaileisthedirectoroftheInstituteforMicrostructureTechnology(IMT)atKarlsruheTechnicalUniversity,Germany.((...))UlrikeWallrabeisProfessorforMicroactuatorsatIMTEKFreiburg,Germany,since2003.ShestudiedphysicsattheUniversityofKarlsruheandwentontoobtainherPh.D.onmicroturbinesandmicromotorsattheInstituteforMicrostructureTechnologyattheResearchCentreinKarlsruhe(FZK)in1992.AtIMT,shesubsequentlydealtwithmicroactuatorsandtheirapplicationinmedicaltechnology.From1999on,sheturnedtomicroopticsanddevelopedcomponentsforopticalmetrology,telecommunicationsandforopticalsensorssuchasfibreconnectors,opticalswitches,distancesensorsandspectrometers,generallyproducedwiththeLIGAmethod.Herresearchinterestsincludeexplorationofnewactuatormaterials,actuatorfabricationtechniques,andcombiningmicroactuatorsandmicrooptics.OsamuTabataisProfessorattheDepartmentofMechanicalEngineeringatKyotoUniversity,Japan.HeperformedindustrialresearchatToyotaCentralResearchandDevelopmentLaboratoriesinAichifrom1981to1996.HethenjoinedtheDepartmentofMechanicalEngineeringofRitsumeikanUniversityinShiga,Japan,andspentGuestProfessorshipsatIMTEKFreiburg,Germany,andatETHZurich,Switzerland.In2003,Japan.Heiscurrentlyengagedintheresearchofmicro/nanoprocesses,theLIGAprocess,MEMSandmicro/nanosystemsyntheticengineering(SENS).HewashonoredwiththeScienceNewsAwardin1987,PresentationPaperAwardin1992,andreceivedtheR&D100Awardin1993and1998.JanG.KorvinkholdsaChairforMicrosystemTechnologyatAlbertLudwigUniversityinFreiburg,Germany,whereherunsthelaboratoryformicrosystemsimulation.Priortothat,heworkedatthePhysicalElectronicsLaboftheETHZurich,wherehebuiltupandledthemicrosystemmodelingeffort.MEMSsimulationprogramsthatweredevelopedbyhimandhisgroupweresuccessfullycommercialized.Hehasco-authoredmorethan100papersinscientificjournalsandconferencedigests,aswellasnumerousbookchaptersandabookonsemiconductorsforengineers.Hisresearchinterestscoverthemodelingandsimulationofmicrosystemsandthelow-costfabricationofpolymer-basedMEMS.
