ULSI Semiconductor Technology Atlas
- 作者
- 出版社 Wiley-Interscience
- 出版时间 2003年10月 第1版
- ISBN 9780471457725
- 定价 2318.40
内容简介
Morethan1,100TEMimagesillustratethescienceofULSIThenaturaloutgrowthofVLSI(VeryLargeScaleIntegration),UltraLargeScaleIntegration(ULSI)referstosemiconductorchipswithmorethan10milliondevicesperchip.Writtenbythreerenownedpioneersintheirfield,ULSISemiconductorTechnologyAtlasusesexamplesandTEM(TransmissionElectronMicroscopy)micrographstoexplainandillustrateULSIprocesstechnologiesandtheirassociatedproblems.ThefirstbookavailableonthesubjecttobeillustratedusingTEMimages,ULSISemiconductorTechnologyAtlasislogicallydividedintofourparts:*PartIincludesbasicintroductionstotheULSIprocess,deviceconstructionanalysis,andTEMsamplepreparation*PartIIfocusesonkeyULSImodules--ionimplantationanddefects,dielectricsandisolationstructures,silicides/salicides,andmetallization*PartIIIexaminesintegrateddevices,includingcompleteplanarDRAM,stackedcellDRAM,andtrenchcellDRAM,aswellasSRAMasexamplesforprocessintegrationanddevelopment*PartIVemphasizesspecialapplications,includingTEMinadvancedfailureanalysis,TEMinadvancedpackagingdevelopmentandUBM(UnderBumpMetallization)studies,andhigh-resolutionTEMinmicroelectronicsThisinnovativeguidealsoprovidesengineersandmanagersinthemicroelectronicsindustry,aswellasgraduatestudents,with:*Morethan1,100TEMimagestoillustratethescienceofULSI*AhistoricalintroductiontothetechnologyaswellascoverageoftheevolutionofbasicULSIprocessproblemsandissues*DiscussionofTEMinotheradvancedmicroelectronicsdevicesandmaterials,suchasflashmemories,SOI,SiGedevices,MEMS,andCD-ROMs
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