多层膜集成结构体声波谐振器（英文版）

MultilayerIntegratedFilmBulkAcousticResonatorsmainlyintroducesthetheory，design，fabricationtechnologyandapplicationofarecentlydevel-opednewtypeofdevice，multilayerintegratedfilmbulkacousticresona-tors，atthemicroandnanoscaleinvolvingmicroelectronicdevices，integratedarcuits，opticaldevices，sensorsandactuators，acousticresona-tors，micro-nanomanufacturing，multilayerintegration，devicetheoryanddesignprinaples，etc.Thesedevicescanworkatveryhighfrequenciesbyusingthenewlydevelopedtheory，design，andfabricationtechnologyofnanoandmicrodevices.ReadersinfieldsofIC，electronicdevices，sensors，materials，andfilmsetc.willbenefitfromthisbookbylearningthedetailedfundamentalsandpotentialapplicationsoftheseadvanceddevices.Prof.YafeiZhangisthedirectoroftheMinistryofEducation'sKeyLabora-toryforTlhinFilmsandMicrofabricationTechnology，PRC;Dr.DaChenwasaPhDstudentinProf.YafeiZhang'sresearchgroup.