内容简介
Fillingtheneedforasingleworkspecificallyaddressinghowtouseplasmaforthefabricationofnanoscalestructures,thisbookisthefirsttocoverplasmadepositioninsufficientdepth.TheauthorhasworkedwithnumerousR&Dinstitutionsaroundtheworld,andherehebeginswithanintroductoryoverviewofplasmaprocessingatmicro-andnanoscales,aswellasthecurrentproblemsandchallenges,beforegoingontoaddresssurfacepreparation,generationanddiagnostics,transportandthemanipulationofnanounits.
作者简介
Dr.KenOstrikovisAustralianQueenElizabethIIFellowatUniversityofSydney,Australia.HehasbeenwithnumerousR&DinstitutionsinGermany,Japan,Singapore,andAustralia.Hisresearchtopicsincludechemicallyactiveplasmasfornanofabrication,synthesisoffunctionalmaterialsandbio-compatiblecoatings,developmentofindustrialprocessspecificationsandintegratedplasmafacilitiesformaterialssynthesisandsurfacemodification,aswellasseveralfundamentaltopics.Dr.Ostrikov'scontributiontothefieldwashonoredbyseveralawardsandfellowshipsandpublishedinmorethan200papersinpeer-reviewedinternationaljournalsandconferenceproceedings.